In Situ Solar Wafer Temperature Measurement during Firing Process via Inline IR Thermography

In Situ Acoustic Temperature Measurement During Variable-Frequency Microwave Curing

Variable-frequency microwave (VFM) curing can perform the same processing steps as conventional thermal processing in minutes, without compromising intrinsic material properties. With increasing demand for novel dielectrics, there is a corresponding demand for new processing techniques that lead to comparable or better properties than conventional methods. VFM processing can be a viable alterna...

Characterization of Endpoint and Wafer Level Non-Uniformity using In-situ Thermography

Abstract This paper investigates in-situ thermographic imaging of a CMP pad during polish to extract spatial endpoint uniformity and polish rate uniformity across the wafer. IR images of the pad contain subtle temperature gradients masked by noise, making endpoint detection difficult. Also effects such as slurry flow, head oscillation, camera angle, and a baseline temperature increase in the pa...

Bioreactor Fill Process Control Using Inline Concentration Measurement

Some biopharmaceutical companies have responded to evolution of the competitive landscape by placing additional emphasis on reducing their costs of manufacturing as a means of maintaining competitiveness. The prototypical current generation biopharmaceutical drug substance manufacturing facility requires a large upfront capital investment. Improving efficiency of use of existing facilities, suc...

Direct Measurement of Wafer Temperature in White/UV LED Manufacture

In-Situ Investigation of Wafer-Slurry-Pad Interactions during CMP

The objective of this project is to acquire in-situ data during chemical mechanical planarization (CMP) including slurry film thickness and flow, wafer-pad contact, waferscale friction, and small-scale shear force measurements. The unifying project goal is to utilize a consistent set of experimental data to develop better physical understanding of material removal rate (MRR) and polish quality ...